Surface measurements by White Light spatialphaseshift imaging interferometry

Yoel Arieli, Shlomi Epshtein, Igor Yakubov, Yosi Weitzman, Garrett Locketz, Alon Harris

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

A novel method of common-path imaging interferometry, the White Light Spatial-Phase-Shift (WLSPS) for object surface measurements, is discussed here. Compared to standard White Light Interferometry (WLI), which uses a reference mirror, the interferometry of WLSPS is obtained by creating manipulations to the light wavefront reflected from an object's surface. Using this approach, surface measurements can be obtained from any real object image, and do not need to be taken directly from the object itself. This creates the ability for a surface measurement tool to be attached to any optical system that generates a real image of an object. Further, as this method does not require a reference beam, the surface measurement system contains inherent vibration cancelation

Original languageEnglish (US)
Pages (from-to)15632-15638
Number of pages7
JournalOptics Express
Volume22
Issue number13
DOIs
StatePublished - Jun 30 2014

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Arieli, Y., Epshtein, S., Yakubov, I., Weitzman, Y., Locketz, G., & Harris, A. (2014). Surface measurements by White Light spatialphaseshift imaging interferometry. Optics Express, 22(13), 15632-15638. https://doi.org/10.1364/OE.22.015632